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High Force non-contact MEMS Actuation by Differential E-Beam Charge Injection **Value Express**

Patent Abstract A microelectromechanical system (MEMS) device includes an actuator having a plurality of charge collection elements. At least one of the charge collection elements is configured to build up electrical charges by directly interacting with an energy field thereby actuating the MEMS through Coulombic interactions. An actuator for a MEMS...

Published: 3/19/2019 | Inventor(s): Ian Harvey, Taylor Meacham, Iain Harvey, Brian Baker, Ronald Boutte

Keywords(s):

Category(s): Instrumentation, MEMS/NEMS