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A Method of Spatially Resolved Measurement of Permittivity and Thickness of Dielectric Films on Surfaces of a Complex Geometry **Value Express**
Patent AbstractA system and method by which thickness of a dielectric film on substrates can be noninvasively determined is invented. The system and method are especially applicable to areas and applications where traditional techniques have proven unsuccessful or limited. According to embodiments of the present invention the present system and method...
Published: 8/1/2019
|
Inventor(s):
Mikhail Skliar
Keywords(s):
Electrical Engineering
,
Mechanical Engineering
,
Nanotechnology
Category(s):
Materials
,
Thin Films
Acoustic Measurements of Temperature Profile
Acoustic Measurements of Temperature Profile University Reference Number: U-4722 Invention Summary University of Utah inventors have developed a method for acoustic measurement of temperature profiles through solids. Traditional approaches to temperature measurements require invasive insertion of sensors, which prevents their deployment in the...
Published: 5/14/2019
|
Inventor(s):
Mikhail Skliar
,
Kevin Whitty
,
Anthony Butterfield
Keywords(s):
Category(s):
Hardware, Circuits & Sensors
,
Instrumentation
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