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Quantitative Inversion of Scanning Capacitance Microprobe (SCM) **Value Express**

Patent AbstractQuantitative dopant profile measurements are performed on a nanometer scale by using a scanning capacitance microscope. A nanometer scale tip of the microscope is positioned at a semiconductor surface, and local capacitance change is measured as a function of sample bias. ‘The method incorporates a feedback system and procedure...

Published: 8/3/2017 | Inventor(s): Clayton Williams, Yunji Huang

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Category(s): Microscopy