Search Results - Microscopy

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Quantitative Inversion of Scanning Capacitance Microprobe (SCM) **Value Express**

Patent AbstractQuantitative dopant profile measurements are performed on a nanometer scale by using a scanning capacitance microscope. A nanometer scale tip of the microscope is positioned at a semiconductor surface, and local capacitance change is measured as a function of sample bias. ‘The method incorporates a feedback system and procedure...

Published: 8/3/2017 | Inventor(s): Clayton Williams, Yunji Huang

Keywords(s):

Category(s): Microscopy

2D/3D Dopant Profiling and Strain Measurement by Single Electron Tunneling

Invention Summary: Previous attempts to image the dopant distribution in silicon using Scanning Tunneling Microscopy (STM) require techniques incompatible with dopant profiling in real devices. This novel technology uses Single Electron Tunneling Microscopy (SETM) to detect and image individual dopant atoms in silicon and other semiconductor materials...

Published: 8/3/2017 | Inventor(s): Clayton Williams

Keywords(s):

Category(s): Microscopy

Methodology for Determination of Trap Depth and Energy by Single Electron / Dynamic Tunneling Force Spectroscopy

Invention Description: Researchers at University of Utah have developed an additional methodology that has been developed that relates to newly developed atomic scale imaging and spectroscopic techniques, Single Electron Tunneling Force Microscopy/ Spectroscopy (SETFM/S) and Dynamic Tunneling Force Microscopy/ Spectroscopy (DTFM/S). the invention...

Published: 8/3/2017 | Inventor(s): Clayton Williams, Jon Johnson

Keywords(s):

Category(s): Microscopy

Method to Measure Depth and Energy of Electronic States by Tunneling Force Microscopy

Invention Description: Electronic trap states in dielectric materials critically influence the reliability and performance of electronic devices. Researchers at The University of Utah have developed a technique to characterize such states with atomic scale spatial resolution. The method is based on tunneling charge measurements, which are performed...

Published: 6/6/2019 | Inventor(s): Clayton Williams, Jon Johnson

Keywords(s):

Category(s): Microscopy, Instrumentation