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On Chip Film Bulk Acoustic Resonator (FBAR)
Invention SummaryA simple fabrication process for increasing the power density of power converters, while maintaining the electromagnetic interference (EMI) at a minimum, has been developed and is available for licensing. A film bulk acoustic resonator (FBAR) is a device consisting of a piezoelectric material sandwiched between two electrodes and acoustically...
Published: 11/21/2019
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Inventor(s):
Faisal Habib Khan
,
Abu Saleh Mohammad Imtiaz
Keywords(s):
Hardware, Circuits & Sensors
,
Semiconductors
Category(s):
Hardware, Circuits & Sensors
,
Semiconductors
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