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High-Quality Thin Films with Tunable Properties
Invention SummaryThe invention consists of sol-gel techniques for the fabrication of high-quality large area single and/or multi-layer thin films made from a variety of oxide-based materials. The fabrication of alternating dielectric multi-layer thin film stacks can currently be divided into two approaches: 1) expensive fabrication and high-quality...
Published: 6/14/2019
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Inventor(s):
Michael Bartl
,
Moussa Barhoum
,
David Riassetto
Keywords(s):
Category(s):
Materials
,
Thin Films
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