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High-Quality Thin Films with Tunable Properties

Invention SummaryThe invention consists of sol-gel techniques for the fabrication of high-quality large area single and/or multi-layer thin films made from a variety of oxide-based materials. The fabrication of alternating dielectric multi-layer thin film stacks can currently be divided into two approaches: 1) expensive fabrication and high-quality...

Published: 6/14/2019 | Inventor(s): Michael Bartl, Moussa Barhoum, David Riassetto

Keywords(s):

Category(s): Materials, Thin Films