Search Results - michael+orthner

1 Results

Sort By:

Optical Pyrometer Pressure Testing Station

Invention Summary: Currently optical/laser profilometers do not have the ability to apply pressure or vacuum to individual devices or wafers. While laser interferometers are used to measure the overall deflection of diaphragms in pressure sensors, they only provide point measurements on the diaphragm and are susceptible to large error. This technology...

Published: 3/24/2020 | Inventor(s): Michael Orthner, Florian Solzbacher, Loren Rieth

Keywords(s): Electrical Engineering, Hardware, Circuits & Sensors, Instrumentation, Materials and Mining

Category(s): Hardware, Circuits & Sensors, Instrumentation