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Two-Way Single Electron Tunneling Methods for Atomic Scale Microscopy and Spectroscopy of Electronic States

Invention Summary: Characterizing dielectric materials, especially high K materials, is important for scaling of semi-conductor devices. A detailed atomic scale understanding of the electronic defects in these materials, including their origins and consequences, does not exist. Electrically active defects in these materials cause significant problems...

Published: 5/7/2019 | Inventor(s): Clayton Williams, Ezra Bussmann

Keywords(s): Microscopy

Category(s): Research Tools & Reagents, Instrumentation