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Improvements to The Quasi-1D SCM AC to Dopant Density Conversion Algorithm and a New Quasi-3D SCM AC Bias to Dopant Density Conversion Algorithm
Invention Summary State of the art integrated circuit technology demonstrates that it is possible to create active and passive electrical and electronic components on a semi-conductive substrate at the sub-micron level. This ability requires accurate knowledge of the spatial extent of dopant impurities that are incorporated into the semi-conductive...
Published: 5/13/2019
|
Inventor(s):
Jeffrey Mcmurray
,
Clayton Williams
Keywords(s):
Microscopy
Category(s):
Computing
,
Data Infrastructure (Data Mining, Visualization & Analysis)
Two-Way Single Electron Tunneling Methods for Atomic Scale
Microscopy
and Spectroscopy of Electronic States
Invention Summary: Characterizing dielectric materials, especially high K materials, is important for scaling of semi-conductor devices. A detailed atomic scale understanding of the electronic defects in these materials, including their origins and consequences, does not exist. Electrically active defects in these materials cause significant problems...
Published: 5/7/2019
|
Inventor(s):
Clayton Williams
,
Ezra Bussmann
Keywords(s):
Microscopy
Category(s):
Research Tools & Reagents
,
Instrumentation
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